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| The Electro-Migration
Evaluation System AEM-1000 applies DC current,
DC pulsed current, and AC pulsed current under
high temperature environment to measure and
evaluate the increase of resistance value
and leak current caused by electromigration. |
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- 1 TEG/1 constant-current
stable power supply control
The power source for constant-current
stress available individually on each
channel (TEG). The failure will be detected
individually on each channel (TEG) and
stress current will be stopped when failure
detected and only for that channel (TEG).
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- Setup of evaluation
condition
per each TEG board
Evaluation test for 100 TEGs is allowed
per chamber. lO TEGs can be loaded on
1 TEG board, and lO TEG board per chamber.
Stress current can be set and applied
to each TEG board, thus enabling independent
testing with different condition for each
board.
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- 3 types of stress
current
Stress is applied by DC current, DC pulsed
current, or AC pulsed current. Test condition
can be selected and set individually per
10 channels.
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