Electromigration Evaluation System (AEM-2000)

Electromigration testing at 1µA, 400°C
Increasing use is being made of microfabrication and new materials in order to increase the levels of performance and integration achieved with semiconductor devices. And as the operating life of devices depends on microfabrication and such new materials, it has become increasingly important to evaluate electromigration under high-precision life-acceleration conditions.High-precision control is used for the temperature (max. 400°C) and current stress that form the main factors in this life acceleration. A Black's model equation and analytical software have been provided to determine product life.

Features

Easy operation
DUT boards can be removed and inserted individually. By inserting Dummy boards instead, Oven can maintain test temperature without large disturbance. It enables you to continue the test. Notice: To use a heatproof glove. 

Newly developed highly reliable Board and Socket
Newly developed highly reliable board and socket have "Double Contact" configuration (patent pending), enabling the connecting parts between the DUT boards and DUT sockets to be fixed firmly. In addition, a unique ESPEC arrangement is used to ensure proper connection between the DUTs and DUT sockets. This new design dramatically reduces faulty contacts at high temperatures and provides low-cost, high-cost-performance DUT boards capable of conducting testing for longer periods than previously possible.

Specifications

Type of evaluation		Electromigration (constant current) testing Stress migration testing Extrusion testing TCR testing
Stress-current	Output range	+1µA to +50mA DC
	Accuracy	1µA to 1 mA: ±(0.2% of S.V.+1µA) 1.01mA to 50mA: ±(0.2% of S.V. +25µA)
	Follow voltage	35V
Extrusion test voltage	Output range	-10V to +20V
	Accuracy	±(2% of setting +20mV)
Oven	Temperature range	+65 to +400°C
	Temperature fluctuation	±0.5°C (+65 to +350°C)
	Temperature Uniformity	±2.5°C (+65 to +350°C)
	accessory	N2 gas inlet

Model		AEM-240C3 AAA	AEM-160C2 0AA	AEM-080C1 00A
EM module output current	Oven 1	50mA	50mA	50mA
	Oven 2	50mA	50mA	-
	Oven 3	50mA	-	-
Number of test channels		240ch	160ch	80ch
DUT board	Number of board	24 (8 x 3 ovens)	16 (8 x 2 ovens)	8
	IC sockets	5 sockets/board (both DIP 28-pin 600 mil and DIP 28-pin 300 mil)
Power supply		200V AC 3φ 50/60Hz (cabinet), 100V AC 1φ 50/60Hz (PC unit)
Power consumption	Cabinet	Max. 10kW	Max. 7kW	Max. 4kW
	PC unit	350W
Cabinet dimensions (mm)		580 x 1220 x 1945	580 x 1220 x 1490
PC rack dimensions (mm)		680 x 640 x 1260