Electromigration Evaluation System (AEM-1000)

The Electro-Migration Evaluation System AEM Series applies DC current, DC pulsed current, and AC pulsed current under high temperature environment to detect and evaluate the increase of resistance value and leak current caused by electromigration. The system will provide electromigration evaluation indispensable for improving reliability of fine pitched LSIs, flip chip solder ball, and coating material.

Features

TEG/1 constant-current
The power source for constant-current stress available individually on each channel (TEG). The failure will be detected individually on each channel (TEG) and stress current will be stopped when failure detected and only for that channel (TEG).

Setup of evaluation condition per each TEG board
Evaluation test for 100 TEGs is allowed per chamber. lO TEGs can be loaded on 1 TEG board, and lO TEG board per chamber. Stress current can be set and applied to each TEG board, thus enabling independent testing with different condition for each board.

3 types of stress current
Stress is applied by DC current, DC pulsed current, or AC pulsed current. Test condition can be selected and set individually per 10 channels

Specifications

Model	AEM-1000
Application	OS-Windows NT
Stress board variation	DC+20mA/50V/0.01mA0.01mA in variable steps (optional) DC+50mA/50V/0.01mA in variable steps (optional) DC pulse AC pulse± 200mA/50V/0.1mA in variable steps DC pulse AC pulse± 500mA/30V/0.1mA in variable steps DC+1A/20V/0.1mA in variable steps (optional)(restricted to maximum of 3W)
Number of channels	Standard 100 channels (Maximum 900 channels)
Number of chambers	Controls up to 9 chambers (100 channels per chamber)
Measurement interval	Linear (minimum 6 min.)/ log t=0.1/log t=1/ 3-block setting
Open detection	Constant detection of open at less than 1 seconds
Measurement mode	Stress ON measurement : Depends on type of stress board Precise current resistance measurement: Measurement current setting range 0.01mA to 1A Leak current measurement : Applied voltage range -20V to +20V (compatible with DC pulse/AC pulse stress board)
Stress current precision (±0.5%+0.1mA)against set value	DC+20mA 1mA to 20mA DC+50mA 1mA to 50mA DC pulse • AC pulse ±200mA 5mA to 200mA DC pulse • AC pulse ±500mA 5mA to 500mA DC+1A 10mA to äPA
Precise resistance measurement	±0.2%(1mA current value application, at 100Ω measurement)
Leak current measurement	Applied voltage : DC-20V to +20V 0.1V variable steps Measurement range : 100pA to 3?A Measurement precision : ±5% ±10nA(over 100MΩ load)
System external dimensions (for 300-channel specification)	System controller	650 x 1300 x 800 mm
	Stress unit	570 x 1830 x 900 mm
Outside dimension of chamber (excluding protrusions)	Maximum +250°C	980 x 550 x 890 mm
	Maximum +350°C	1040 x 840 x 1075 mm
	Maximum +400°C	1190 x 1110 x 1195 mm
Required utility (for 100 channels per chamber)	System controller	AC100V± 10% 50/60Hz 15Ax 1
	Stress unit	AC200V± 10% 50/60Hz 50Ax 1
	Chamber (+250°C spec)	AC200V± 10% 50/60Hz 20Ax 1